| Lemma | ARF |
|---|---|
| Rank | 20527 |
| Frequency | 31 |
| Japanese | ARF |
| Commentary | ASEAN Regional Forum. ASEAN地域フォーラム |
| Example(eng) | To provide a new negative resist composition suitable for an ArF excimer laser. |
| Example(Jpn) | ＡｒＦエキシマレーザー用として好適な新規ネガ型レジスト組成物の提供。 |
| Source | 特許庁 |
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